Energy-dispersive X-ray spectroscopy (EDS, or EDX) is a powerful analytical method for determining chemical composition at the macro-, micro- and nano-levels. EDS obtains information about composition from the X-rays emitted as an electron beam scans across the sample, with each element being identified by its characteristic X-ray line profile.
EDS is used to analyse almost the entire periodic table, providing information on the distribution ofthe elements present. The information provided by EDS supports in-depth characterisation of materials for a wide range of industrial and academic applications, from process and quality control to failure analysis and fundamental research.